The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Jan. 14, 2011
Yusuke Miyazaki, Hitachinaka, JP;
Kenji Aiko, Ninomiya, JP;
Yuichiro Iijima, Hitachinaka, JP;
Yuichiro Kato, Mito, JP;
Yusuke Miyazaki, Hitachinaka, JP;
Kenji Aiko, Ninomiya, JP;
Yuichiro Iijima, Hitachinaka, JP;
Yuichiro Kato, Mito, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor.