The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Feb. 07, 2008
Applicants:
Bernhard Weigl, Steinheim, DE;
Rick Sandstrom, Encinitas, CA (US);
Inventors:
Bernhard Weigl, Steinheim, DE;
Rick Sandstrom, Encinitas, CA (US);
Assignees:
Cymer, LLC, San Diego, CA (US);
Carl Zeiss Laser Optics GmbH, , DE;
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01);
U.S. Cl.
CPC ...
Abstract
The disclosure relates to an illuminating apparatus for illuminating a sample on a work stage, optionally with a relatively narrow illuminating line of relatively controlled energy, as well as methods for controlling energy of a laser source when illuminating a sample on a work stage with a relatively narrow illuminating line.