The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Dec. 22, 2008
Huibert Visser, Zevenhuizen, NL;
Martinus Hendricus Hendricus Hoeks, Breugel, NL;
Borgert Kruizinga, Zoetermeer, NL;
Bob Streefkerk, Tilburg, NL;
Patricius Aloysius Jacobus Tinnemans, Hapert, NL;
Erwin John Van Zwet, Pijnacker, NL;
Roeland Nicolaas Maria Vanneer, Eindhoven, NL;
Marcus Gerhardus Hendrikus Meijerink, The Hague, NL;
Nicolaas Cornelis Johannes Van Der Valk, Zoetermeer, NL;
Har Van Himbergen, The Hague, NL;
Huibert Visser, Zevenhuizen, NL;
Martinus Hendricus Hendricus Hoeks, Breugel, NL;
Borgert Kruizinga, Zoetermeer, NL;
Bob Streefkerk, Tilburg, NL;
Patricius Aloysius Jacobus Tinnemans, Hapert, NL;
Erwin John Van Zwet, Pijnacker, NL;
Roeland Nicolaas Maria Vanneer, Eindhoven, NL;
Marcus Gerhardus Hendrikus Meijerink, The Hague, NL;
Nicolaas Cornelis Johannes Van Der Valk, Zoetermeer, NL;
Har Van Himbergen, The Hague, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Apparatus and methods are used to calibrate an array of individually controllable elements within a lithographic apparatus. A calibration unit can switch between a first state in which the modulated beam of radiation passes into a projection system for projecting the modulated beam of radiation onto a substrate and a second state in which a portion of the modulated beam of radiation is inspected by the calibration unit. The calibration unit generates calibration data, or alternatively, updates calibration data, based on the inspection of the modulated beam of radiation. An array controller uses the calibration data to provide control signals to elements of an array of individually controllable elements, which are subsequently configured in response to the control signals.