The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Mar. 31, 2008
Richard Jones, San Mateo, CA (US);
Richard Jones, San Mateo, CA (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
The dominant source of thermal resistance for silicon photonic devices patterned on SOI wafers is the buried oxide layer. To ensure efficient thermally driven silicon devices there is a need for a large thermal resistance. This is in contrast to temperature sensitive components need to have low thermal resistance in order to reduce their temperature to ensure good performance. Embodiments comprise etching the back of an SOI wafer to expose the buried oxide layer and depositing an additional layer of silicon oxide to increase the local thermal resistance. Thus, embodiments provide the ability to tailor the thermal resistance across the wafer or die depending on the device being fabricated.