The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Nov. 19, 2012
Applicant:
Jeol Ltd., Tokyo, JP;
Inventor:
Tsutomu Negishi, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 1/44 (2006.01); H01J 49/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
An ion beam processing system () processes the sample (S) mounted on a sample stage () by irradiating the sample with an ion beam in a sample chamber (). The system has a sample container () including a cover portion () formed to be detachably mountable to a base portion (), the sample stage () on which the container () is detachably mountable, and cover mounting/dismounting apparatus () for mounting and dismounting the cover portion () from outside the sample chamber ().