The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Aug. 04, 2009
Wilfried Lerch, Dornstadt-Tomerdingen, DE;
Zsolt Nenyel, Blaustein, DE;
Thomas Theiler, Ulm, DE;
HQ-Dielectrics GmbH, Dornstadt, DE;
Abstract
A device for producing a microwave plasma, and a device and a method for treating semiconductor substrates with a microwave plasma, the microwave plasma device comprising at least one electrode (), an electrode () comprising a coaxial inner conductor () made of electrically conductive material and a coaxial outer conductor () made of electrically conductive material and surrounding the inner conductor at least partially and being disposed at a distance thereto, and a plasma ignition device () that is connected to the coaxial inner conductor (), characterized in that the coaxial outer conductor () comprises at least one first partial region () in which it completely surrounds the coaxial inner conductor () along the longitudinal axis thereof and comprises at least one further partial region () in which it surrounds the coaxial inner conductor () partially such that microwave radiation generated by the microwave generator () can exit in the at least one further partial region () substantially perpendicular to the longitudinal axis of the coaxial inner conductor ().