The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Sep. 07, 2011
Yuichi Ohsawa, Yokohama, JP;
Shigeki Takahashi, Yokohama, JP;
Junichi Ito, Yokohama, JP;
Daisuke Saida, Fuchu, JP;
Kyoichi Suguro, Yokohama, JP;
Hiroaki Yoda, Sagamihara, JP;
Yuichi Ohsawa, Yokohama, JP;
Shigeki Takahashi, Yokohama, JP;
Junichi Ito, Yokohama, JP;
Daisuke Saida, Fuchu, JP;
Kyoichi Suguro, Yokohama, JP;
Hiroaki Yoda, Sagamihara, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According to one embodiment, a method of manufacturing a magnetic memory, the method includes forming a first magnetic layer having a variable magnetization, forming a tunnel barrier layer on the first magnetic layer, forming a second magnetic layer on the tunnel barrier layer, the second magnetic layer having an invariable magnetization, forming a hard mask layer as a mask on the second magnetic layer, patterning the second magnetic layer by using the mask of the hard mask layer, and executing a GCIB-irradiation by using the mask of the hard mask layer, after the patterning.