The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Sep. 21, 2011
Katsumi Shibayama, Hamamatsu, JP;
Masaomi Takasaka, Hamamatsu, JP;
Katsumi Shibayama, Hamamatsu, JP;
Masaomi Takasaka, Hamamatsu, JP;
Hamamatsu Photonics K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
A method of manufacturing a spectroscopic sensorcomprises a first step of forming a cavity layerby nanoimprinting on a handle substrate; a second step of forming a first mirror layeron the cavity layerafter the first step; a third step of joining a light-transmitting substrateonto the first mirror layerafter the second step; a fourth step of removing the handle substrate from the cavity layerafter the third step; a fifth step of forming a second mirror layeron the cavity layerwithout the handle substrate after the fourth step; and a sixth step of joining the light detection substrateonto the second mirror layerafter the fifth step.