The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2014

Filed:

Apr. 27, 2009
Applicants:

Yutaka Kadowaki, Kanagawa, JP;

Tomoko Saitou, Kanagawa, JP;

Keng Weng Lim, Kanagawa, JP;

Katsuhiko Mushiake, Chiba, JP;

Inventors:

Yutaka Kadowaki, Kanagawa, JP;

Tomoko Saitou, Kanagawa, JP;

Keng Weng Lim, Kanagawa, JP;

Katsuhiko Mushiake, Chiba, JP;

Assignee:

Ulvac, Inc., Kanagawa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09D 1/00 (2006.01); B05D 1/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

Herein disclosed are a water-reactive Al composite material which comprises 4NAI or 5NAI containing added In in an amount ranging from 2 to 5% by mass; and added Si and Si as an impurity in a total amount ranging from 0.04 to 0.6% by mass on the basis of the amount of Al; a thermally sprayed Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this thermally sprayed Al film on the surface thereof.


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