The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Dec. 22, 2010
Kazuo Haruna, Osaka, JP;
Kiyokazu Maruta, Osaka, JP;
Hidenori Kuwata, Osaka, JP;
Koichi Shima, Osaka, JP;
Kazuo Haruna, Osaka, JP;
Kiyokazu Maruta, Osaka, JP;
Hidenori Kuwata, Osaka, JP;
Koichi Shima, Osaka, JP;
Sumitomo Seiko Chemicals Co., Ltd., Hyogo, JP;
Abstract
A double vacuum pump apparatus (Y) includes positive displacement vacuum pumps (A,B) and lines (). Each of the vacuum pumps includes a suction port () and a discharge port (), and a pressure detector () is provided in the vicinity of the suction port () of the double vacuum pump apparatus (Y). The line () connects the discharge port () of the vacuum pump (A) to the suction port () of the vacuum pump (B). The line () has an end (E) and an end (E) that are connected to the connection line (), and includes a buffer tube (Z) and an on-off valve () located between the tube (Z) and the end (E). A pressure detection signal from the pressure detector () is used as an on/off signal for the on-off valve ().