The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Aug. 29, 2011
Tetsuo Kani, Yokohama, JP;
Tomoyasu Ueda, Hamura, JP;
Kiyoshi Ogata, Mianto, JP;
Kazuhiko Omote, Akiruno, JP;
Kenji Wakasaya, Akishima, JP;
Tetsuo Kani, Yokohama, JP;
Tomoyasu Ueda, Hamura, JP;
Kiyoshi Ogata, Mianto, JP;
Kazuhiko Omote, Akiruno, JP;
Kenji Wakasaya, Akishima, JP;
Rigaku Corporation, Akishima-Shi, Tokyo, JP;
Abstract
A motion control system comprising a servo motor for moving a rotary stage; a scale provided on the rotary stage or on an object that moves integrally with the rotary stage; a plurality of reading heads for detecting the scale and outputting a signal; a data processing part for calculating an average value of rotation angle data based on each of the output signals from the reading heads and outputting the average value as a signal; and a servo amplifier for controlling the motor based on the signal representing the average value of the rotation angle. The motion control system can cause the rotary stage to rotate to a desired rotation angle to a high degree of accuracy using the reading heads.