The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Feb. 10, 2012
Shih-wei Chang, Natick, MA (US);
Valeriy V. Ginzburg, Midland, MI (US);
Erin B. Vogel, Midland, MI (US);
Daniel J. Murray, Midland, MI (US);
Peter Trefonas, Medway, MA (US);
Phillip D. Hustad, Manvel, TX (US);
Shih-Wei Chang, Natick, MA (US);
Valeriy V. Ginzburg, Midland, MI (US);
Erin B. Vogel, Midland, MI (US);
Daniel J. Murray, Midland, MI (US);
Peter Trefonas, Medway, MA (US);
Phillip D. Hustad, Manvel, TX (US);
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Abstract
A block copolymer composition containing a diblock copolymer blend including a first poly(methyl methacrylate)-b-poly((trimethylsilyl)methyl methacrylate) diblock copolymer; and, a second poly(methyl methacrylate)-b-poly((trimethylsilyl)methyl methacrylate) diblock copolymer. Also provided are substrates treated with the block copolymer composition.