The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Aug. 20, 2009
Sun Yong Park, Chungcheongnam-do, KR;
Choon Sik Kim, Chungcheongnam-do, KR;
Jeong Yong Bae, Chungcheongnam-do, KR;
Sun Yong Park, Chungcheongnam-do, KR;
Choon Sik Kim, Chungcheongnam-do, KR;
Jeong Yong Bae, Chungcheongnam-do, KR;
Semes Co., Ltd., Chungheongnam-do, KR;
Abstract
A substrate processing apparatus includes a main load unit, a buffer load unit, and a transfer unit. Containers each accommodating substrates are placed on the main load unit and the buffer load unit. The buffer load unit is disposed above the main load unit and movable into and outward from a process module. Therefore, more containers can be placed in the substrate processing apparatus without increasing the footprint of the substrate processing apparatus, and thus it is possible to reduce equipment idle time during which standby substrates wait before being processed, thereby improving productivity.