The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Jun. 13, 2011
Randall S. Mundt, Pleasanton, CA (US);
Paul Douglas Macdonald, Tracy, CA (US);
Andrew Beers, Liberty Hill, TX (US);
Mason L. Freed, Pleasant Hill, CA (US);
Costas J. Spanos, Lafayette, CA (US);
Randall S. Mundt, Pleasanton, CA (US);
Paul Douglas MacDonald, Tracy, CA (US);
Andrew Beers, Liberty Hill, TX (US);
Mason L. Freed, Pleasant Hill, CA (US);
Costas J. Spanos, Lafayette, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A sensor apparatus for measuring a plasma process parameter for processing a workpiece. The sensor apparatus includes a base, an information processor supported on or in the base, and at least one sensor supported on or in the base. The at least one sensor includes at least one sensing element configured for measuring an electrical property of a plasma and may include a transducer coupled to the at least one sensing element. The transducer can be configured to receive a signal from the sensing element and convert the signal into a second signal for input to the information processor.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile