The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Feb. 10, 2012
Erin B. Vogel, Midland, MI (US);
Valeriy V. Ginzburg, Midland, MI (US);
Shih-wei Chang, Natick, MA (US);
Daniel J. Murray, Midland, MI (US);
Phillip D. Hustad, Manvel, TX (US);
Peter Trefonas, Medway, MA (US);
Erin B. Vogel, Midland, MI (US);
Valeriy V. Ginzburg, Midland, MI (US);
Shih-Wei Chang, Natick, MA (US);
Daniel J. Murray, Midland, MI (US);
Phillip D. Hustad, Manvel, TX (US);
Peter Trefonas, Medway, MA (US);
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Abstract
A copolymer composition including a block copolymer having a poly(methyl methacrylate) block and a poly((trimethylsilyl)methyl methacrylate) block is provided; wherein the block copolymer exhibits a number average molecular weight, M, of 1 to 1,000 kg/mol; and, wherein the block copolymer exhibits a polydispersity, PD, of 1 to 2. Also provided are substrates treated with the copolymer composition.