The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Sep. 02, 2011
Kyung-seok OH, Seoul, KR;
Kyung-mun Byun, Seoul, KR;
Shin-hye Kim, Suwon-si, KR;
Deok-young Jung, Seoul, KR;
Gil-heyun Choi, Seoul, KR;
Eunkee Hong, Seongnam-si, KR;
Kyung-seok Oh, Seoul, KR;
Kyung-mun Byun, Seoul, KR;
Shin-hye Kim, Suwon-si, KR;
Deok-young Jung, Seoul, KR;
Gil-heyun Choi, Seoul, KR;
Eunkee Hong, Seongnam-si, KR;
Abstract
Provided according to embodiments of the present invention are an oxidation-promoting compositions, methods of forming oxide layers, and methods of fabricating semiconductor devices. In some embodiments of the invention, the oxidation-promoting composition includes an oxidation-promoting agent having a structure of A-M-L, wherein L is a functional group that is chemisorbed to a surface of silicon, silicon oxide, silicon nitride, or metal, A is a thermally decomposable oxidizing functional group, and M is a moiety that allows A and L to be covalently bonded to each other.