The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Jul. 11, 2012
Audrey Berthelot, St Ismier, FR;
Vincent Larrey, La Murette, FR;
Jean-philippe Polizzi, Grenoble, FR;
Marie-hélène Vaudaine, Seyssins, FR;
Hemant Desai, Gilbert, AZ (US);
Woo Tae Park, Seoul, KR;
Audrey Berthelot, St Ismier, FR;
Vincent Larrey, La Murette, FR;
Jean-Philippe Polizzi, Grenoble, FR;
Marie-Hélène Vaudaine, Seyssins, FR;
Hemant Desai, Gilbert, AZ (US);
Woo Tae Park, Seoul, KR;
Commissariat a l'energie atomique et aux energies alternatives, Paris, FR;
FREESCALE Semiconductor Inc, Austin, TX (US);
Abstract
A device being a micro-system and/or a nano-system which includes a first substrate, having at least one lower electrode and at least one dielectric layer, and includes an intermediate substrate extending across a main plane of the device and including a moving portion. The intermediate substrate is attached, outside the moving portion, by molecular bonding to the first substrate. The moving portion faces at least a portion of the lower electrode. The device also includes an upper substrate, attached to the intermediate substrate. The moving portion is movable between the lower electrode and the upper substrate. The first, intermediate, and upper substrates extend in a plane parallel to the main plane of the device. The lower electrode detects a component of the movement of the moving portion perpendicular to the plane of the device.