The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Apr. 23, 2012
Shinichi Kojima, Cupertino, CA (US);
Christopher F. Bevis, Los Gatos, CA (US);
Joseph Maurino, San Mateo, CA (US);
William M. Tong, San Francisco, CA (US);
Shinichi Kojima, Cupertino, CA (US);
Christopher F. Bevis, Los Gatos, CA (US);
Joseph Maurino, San Mateo, CA (US);
William M. Tong, San Francisco, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
One embodiment disclosed relates a method of detecting a patterned electron beam. The patterned electron beam is focused onto a grating with a pattern that has a same pitch as the patterned electron beam. Electrons of the patterned electron beam that pass through the grating un-scattered are detected. Another embodiment relates to focusing the patterned electron beam onto a grating with a pattern that has a second pitch that is different than a first pitch of the patterned electron beam. Electrons of the patterned electron beam that pass through the grating form a Moiré pattern that is detected using a position-sensitive detector. Other embodiments, aspects and features are also disclosed.