The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Jan. 31, 2012
Wade Hampton Bailey, Iii, Emmaus, PA (US);
Sergei Vladimirovich Ivanov, Schnecksville, PA (US);
Xinjian Lei, Vista, CA (US);
Moo-sung Kim, Sungnam, KR;
Wade Hampton Bailey, III, Emmaus, PA (US);
Sergei Vladimirovich Ivanov, Schnecksville, PA (US);
Xinjian Lei, Vista, CA (US);
Moo-Sung Kim, Sungnam, KR;
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
Metal-containing complexes with general formula (1) (RPyr)(RPyr)MLL; or (2) [(RXR)(RPyr)(RPyr)]MLLare disclosed; wherein M is a Group IV metal, Pyr is pyrrolyl ligand, n=1, 2 and 3, Land Lare independently selected from alkoxide, amide or alkyl, Land Lcan be linked together, Rand Rcan be same or different organic groups substituted at 2,3,4-positions of the pyrrole ring and are selected from the group consisting of linear and branched Calkyls, Rand Rare independently selected from the linear or branched chain alkylene group having 2-6 carbon atoms, and X is CHor oxygen. Methods of using the metal complexes as precursors to deposit metal or metal oxide films used for various devices in semi-conductor industries are also discussed.