The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Nov. 17, 2010
Yun Wang, San Jose, CA (US);
Tony P. Chiang, Campbell, CA (US);
Ryan Clarke, San Jose, CA (US);
Chi-i Lang, Cupertino, CA (US);
Yoram Schwarz, Santa Clara, CA (US);
Yun Wang, San Jose, CA (US);
Tony P. Chiang, Campbell, CA (US);
Ryan Clarke, San Jose, CA (US);
Chi-I Lang, Cupertino, CA (US);
Yoram Schwarz, Santa Clara, CA (US);
Intermolecular, Inc., San Jose, CA (US);
Abstract
A method and system of improved reliability testing includes providing a first substrate and a second substrate, each substrate comprising only a first metallization layer; processing regions on a first substrate by combinatorially varying at least one of materials, unit processes, and process sequences; performing a first reliability test on the processed regions on the first substrate to generate first results; processing regions on a second substrate in a combinatorial manner by varying at least one of materials, unit processes, and process sequences based on the first results of the first reliability test; performing a second reliability test on the processed regions on the second substrate to generate second results; and determining whether the first substrate and the second substrate meet a predetermined quality threshold based on the second results.