The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
May. 26, 2011
Harish P. Hiriyannaiah, San Jose, CA (US);
Donald D. Walker, San Jose, CA (US);
Harish P. Hiriyannaiah, San Jose, CA (US);
Donald D. Walker, San Jose, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A method for determining a peak value of a histogram or a sequence of sampled data is disclosed. The method may include fitting a curve to the sequence of data, the curve being modeled based on an orthonormal expansion; obtaining a differential curve, the differential curve describing changes in slope of the curve fitted to the sequence of data; finding at least one root for the differential curve; for each of the at least one root for the differential curve, calculating a corresponding value on the curve fitted to the sequence of data; and determining the peak value of the sequence of data based on a maximum value among the corresponding value calculated for each of the at least one root.