The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Aug. 12, 2011
Tomonori Goto, Sapporo, JP;
Jyota Miyakura, Kawasaki, JP;
Hidemitsu Asano, Kawasaki, JP;
Takeshi Saeki, Kawasaki, JP;
Tomonori Goto, Sapporo, JP;
Jyota Miyakura, Kawasaki, JP;
Hidemitsu Asano, Kawasaki, JP;
Takeshi Saeki, Kawasaki, JP;
Mitutoyo Corporation, Kawasaki, JP;
Abstract
A shape measuring method includes guiding light emitted from a light source to an object to be measured and a reference surface, combining light reflected from the object to be measured with light reflected from the reference surface, and taking a distribution image of an interference light intensity corresponding to each measurement position of the object to be measured, while changing an optical path length difference between a first optical path length and a second optical path length over a whole scanning zone, sequentially storing distribution images of the interference light intensity in the whole scanning zone, and obtaining an interference light intensity string at each measurement position based on the stored distribution images of the interference light intensity, and obtaining a position in an optical axis direction at each measurement position of the object to be measured from a peak position of the interference light intensity string.