The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
May. 26, 2011
Henrikus Herman Marie Cox, Eindhoven, NL;
Willem Herman Gertruda Anna Koenen, Roermond, NL;
Thomas Augustus Mattaar, Veldhoven, NL;
Martinus Theodorus Jacobus Pieterse, Veldhoven, NL;
Rob Antonius Andries Verkooijen, Dongen, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Willem Herman Gertruda Anna Koenen, Roermond, NL;
Thomas Augustus Mattaar, Veldhoven, NL;
Martinus Theodorus Jacobus Pieterse, Veldhoven, NL;
Rob Antonius Andries Verkooijen, Dongen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A measurement system is configured to derive a position quantity of an object, the measurement system includes at least one position quantity sensor configured to provide respective position quantity measurement signals; a position quantity calculator configured to determine a position quantity of the object from the position quantity measurement signal, wherein the position quantity calculator includes a torsion estimator configured to estimate a torsion of the object, the position quantity calculator being configured to correct the determined position quantity of the object for the estimated torsion.