The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Apr. 24, 2013
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Robert J. Foster, Brooklyn, NY (US);
Lin Zhou, LaGrangeville, NY (US);
Shahin Zangooie, San Jose, CA (US);
Roger M. Young, Warwick, NY (US);
Clemente Bottini, Marlboro, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/08 (2006.01); G01R 31/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system and method is provided for correcting alignment of a product on a tool and, more particularly, to a system and method for correcting alignment of a wafer on a chuck of a tool. The system is a tool including at least one contact near a circumference of the tool and a grounded contact proximate to the at least one contact.