The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Mar. 01, 2012
Applicant:
Masayasu Tanjo, Kyoto, JP;
Inventor:
Masayasu Tanjo, Kyoto, JP;
Assignee:
Nissin Ion Equipment Co., Ltd, Kyoto, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Provided is a method of controlling an ion implantation apparatuswhich includes: a mass separatorfor sorting out and outputting ions having a specific mass number and valence from an ion beam IB extracted from an ion source; an acceleration tubefor accelerating or decelerating the ion beam IB output from the mass separator; and an energy separatorfor sorting out and outputting ions having a specific energy from the ion beam IB output from the acceleration tube. The method comprises, during an acceleration mode, controlling an acceleration voltage Vsuch that it is prevented from becoming 0 kV.