The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Apr. 27, 2009
Heiko Brunner, Berlin, DE;
Bernd Roelfs, Berlin, DE;
Dirk Rohde, Berlin, DE;
Thomas Pliet, Berlin, DE;
Heiko Brunner, Berlin, DE;
Bernd Roelfs, Berlin, DE;
Dirk Rohde, Berlin, DE;
Thomas Pliet, Berlin, DE;
Atotech Deutschland GmbH, Berlin, DE;
Abstract
An aqueous, acid bath for the electrolytic deposition of copper contains at least one copper ion source, at least one acid ion source, at least one brightener compound, and at least one leveler compound, and generates a very uniform copper deposit in particular in blind micro vias (BMVs) and trenches. The leveler compound is selected from among synthetically produced non-functionalized peptides, synthetically produced functionalized peptides, and synthetically produced functionalized amino acids.