The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Dec. 12, 2008
Applicant:
Tsuyoshi Shimizu, Kanagawa, JP;
Inventor:
Tsuyoshi Shimizu, Kanagawa, JP;
Assignee:
Ulvac, Inc., Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides a chambercomprising a chamber sectionhaving a substrate processing compartment into which a substrate is loaded for a predetermined processing step, and reinforcing membersremovably mounted on the discrete outer walls of the chamber section. Each of the reinforcing members comprises a plate-like joint memberor a rib memberwhich is removably mounted on the corresponding outer wall of the chamber section. The reinforcing member may comprise both the plate-like joint memberand rib member