The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Feb. 27, 2012
Frank Johannes Jacobus Van Boxtel, Eindhoven, NL;
Pieter Debrauwer, Vught, NL;
Antonius Arnoldus Henricus Van Der Steen, Best, NL;
Robin Bernardus Johannes Koldeweij, Tilburg, NL;
Frank Johannes Jacobus Van Boxtel, Eindhoven, NL;
Pieter Debrauwer, Vught, NL;
Antonius Arnoldus Henricus Van Der Steen, Best, NL;
Robin Bernardus Johannes Koldeweij, Tilburg, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A gas manifold to direct a gas flow between two parallel plates of an optical component of a lithographic apparatus, the gas manifold having an inlet to provide a gas flow to the gas manifold, a lattice comprising a plurality of through holes to homogenize the gas flow, a contractor downstream of the lattice to reduce the cross sectional area through which the gas flow flows, and an outlet downstream of the contractor to provide the gas flow to the two parallel plates.