The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Feb. 17, 2009
Geoffrey Alan Schultz, Shelton, CT (US);
Geoffrey Alan Schultz, Shelton, CT (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
A gas gauge () is provided for use in a vacuum environment having a measurement gas flow channel (). The gas gauge comprises a measurement nozzle () in the measurement gas flow channel (). The measurement nozzle () is configured to operate at a sonically choked flow condition of a volumetric flow being sourced from a gas supply () coupled to the measurement gas flow channel (). The gas gauge () further comprises a pressure sensor () operatively coupled to the measurement gas flow channel () downstream from the sonically choked flow condition of the volumetric flow to measure a differential pressure of the volumetric flow for providing an indication of a gap () between a distal end of the measurement nozzle () and a target surface () proximal thereto.