The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Apr. 26, 2009
Applicant:
Hui-shen Shih, Chang-Hua Hsien, TW;
Inventor:
Hui-Shen Shih, Chang-Hua Hsien, TW;
Assignee:
United Microelectronics Corp., Science-Based Industrial Park, Hsin-Chu, TW;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A multifunction MEMS element includes a first cantilever, a second cantilever and a MEMS component. The first cantilever, the second cantilever and the MEMS component together form a MEMS structure. The MEMS component includes an inductor device.