The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Dec. 21, 2012
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Hiraku Ishikawa, Sendai, JP;
Teruyuki Hayashi, Sendai, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
Abstract
A sealing film forming method is capable of forming a sealing film having high moisture permeability resistance in a shorter time and at lower cost. The sealing film forming method for forming a sealing filmthat seals an EL deviceincludes forming a first inorganic layeron a surface of the EL device; forming a hydrocarbon layeron the first inorganic layer; flattening the hydrocarbon layerby softening or melting the hydrocarbon layer; curing the hydrocarbon layer; and forming a second inorganic layerthicker than the first inorganic layeron the hydrocarbon layerafter curing the hydrocarbon layer