The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Nov. 04, 2011
Masahiro Hatakeyama, Kanagawa, JP;
Kenji Watanabe, Kanagawa, JP;
Takeshi Murakami, Tokyo, JP;
Tohru Satake, Kanagawa, JP;
Nobuharu Noji, Kanagawa, JP;
Masahiro Hatakeyama, Kanagawa, JP;
Kenji Watanabe, Kanagawa, JP;
Takeshi Murakami, Tokyo, JP;
Tohru Satake, Kanagawa, JP;
Nobuharu Noji, Kanagawa, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present invention provides a surface inspection method and apparatus for inspecting a surface of a sample, in which a resistive film is coated on the surface, and a beam is irradiated to the surface having the resistive film coated thereon, to thereby conduct inspection of the surface of the sample. In the surface inspection method of the present invention, a resistive film having an arbitrarily determined thickness tis first coated on a surface of a sample. Thereafter, a part of the resistive film having the arbitrarily determined thickness tis dissolved in a solvent, to thereby reduce the thickness of the resistive film to a desired level. This enables precise control of a value of resistance of the resistive film and suppresses distortion of an image to be detected.