The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 18, 2014

Filed:

Feb. 15, 2011
Applicants:

Toyoaki Nakajima, Kanagawa, JP;

Yuujirou Kurokawa, Kanagawa, JP;

Tsutomu Yuri, Kanagawa, JP;

Ryota Tanaka, Kanagawa, JP;

Inventors:

Toyoaki Nakajima, Kanagawa, JP;

Yuujirou Kurokawa, Kanagawa, JP;

Tsutomu Yuri, Kanagawa, JP;

Ryota Tanaka, Kanagawa, JP;

Assignee:

Ulvac, Inc., Kanagawa, JP;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

A quadrupole mass spectrometer for use in analyzing gas components in a test piece is made in a constitution in which resistance heating of a grid is materialized, and in which a high-accuracy analysis of the gas components is possible at a low cost while preventing the sensitivity from lowering. A quadrupole mass spectrometer is provided with a sensor section which can be detachably fitted to the test piece. Supposing that the direction of fitting the sensor section to the test piece is in an upward direction, the sensor section is provided with: a predetermined shape of supporting body which is provided at a lower end of the sensor section; an ion source which is provided on the supporting body and which has a filament and a grid for ionizing the gas; a quadrupole section which is provided on the ion source and in which four columnar electrodes are disposed at a predetermined circumferential distance from one another; and an ion detection section which is disposed on the quadrupole section and which collects predetermined ions that have passed through the quadrupole section by applying DC and AC voltages between opposite electrodes.


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