The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
May. 25, 2012
David J. Altknecht, San Jose, CA (US);
Robert E. Erickson, San Jose, CA (US);
Christopher O. Lada, Los Gatos, CA (US);
Stuart Stephen Papworth Parkin, San Jose, CA (US);
Mahesh Samant, San Jose, CA (US);
David J. Altknecht, San Jose, CA (US);
Robert E. Erickson, San Jose, CA (US);
Christopher O. Lada, Los Gatos, CA (US);
Stuart Stephen Papworth Parkin, San Jose, CA (US);
Mahesh Samant, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A shadow masking device for use in the semiconductor industry includes self-aligning mechanical components that permit shadow masks to be exchanged while maintaining precise alignment with the target substrate. The misregistration between any two of the various layers in the formed structure can be kept to less than 40 microns.