The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Sep. 02, 2010
Applicants:
Markku Rajala, Vantaa, FI;
Juha Tikkanen, Tampere, FI;
Inventors:
Markku Rajala, Vantaa, FI;
Juha Tikkanen, Tampere, FI;
Assignee:
Beneq Oy, Vantaa, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and apparatus for controlling a vapor deposition based coating process, including monitoring ultrafine particles, and adjusting at least one process parameter based on the monitoring. During at least one stage of the coating deposition process, at least one of the coating precursors includes a gas, a vapor, or an aerosol.