The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 18, 2014

Filed:

Dec. 15, 2010
Applicants:

Youfan Gu, Superior, CO (US);

David Neumeister, Loveland, CO (US);

Kevin Grout, Denver, CO (US);

Inventors:

Youfan Gu, Superior, CO (US);

David Neumeister, Loveland, CO (US);

Kevin Grout, Denver, CO (US);

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F16K 1/52 (2006.01);
U.S. Cl.
CPC ...
Abstract

A two-stage, slow-start valve includes a minor valve assembly inside a major valve closure member of a major valve closure assembly so that fluid can flow through the valve at a higher rate by opening the major valve assembly or at a lower rate by opening the minor valve assembly while the major valve closure assembly is closed in order to allow fluid to flow in an alternate flow path through the major valve closure member. The example minor valve closure assembly has a minor valve closure member that is actuated to open by a minor valve piston on which minor valve actuating fluid is applied to the minor piston via a diaphragm seal positioned between the minor piston and the minor valve actuating fluid. Both the major valve closure assembly and the minor valve closure assembly can be pneumatically actuated to open.


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