The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2014
Filed:
Oct. 21, 2010
Jan Hoentschel, Dresden, DE;
Sven Beyer, Dresden, DE;
Thilo Scheiper, Dresden, DE;
Uwe Griebenow, Markkleeberg, DE;
Jan Hoentschel, Dresden, DE;
Sven Beyer, Dresden, DE;
Thilo Scheiper, Dresden, DE;
Uwe Griebenow, Markkleeberg, DE;
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
Sophisticated high-k metal gate electrode structures are provided on the basis of a hybrid process strategy in which the work function of certain gate electrode structures is adjusted in an early manufacturing stage, while, in other gate electrode structures, the initial gate stack is used as a dummy material and is replaced in a very advanced manufacturing stage. In this manner, superior overall process robustness in combination with enhanced device performance may be achieved.