The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2014
Filed:
Oct. 08, 2009
Takashi Masubuchi, Fujimino, JP;
Kazunori Mori, Iruma-gun, JP;
Yuji Hagiwara, Kawagoe, JP;
Satoru Narizuka, Saitama, JP;
Kazuhiko Maeda, Tokyo, JP;
Takashi Masubuchi, Fujimino, JP;
Kazunori Mori, Iruma-gun, JP;
Yuji Hagiwara, Kawagoe, JP;
Satoru Narizuka, Saitama, JP;
Kazuhiko Maeda, Tokyo, JP;
Central Glass Company, Limited, Ube-shi, JP;
Abstract
According to the present invention, there is provided a polymerizable fluorine-containing sulfonic acid onium salt of the following general formula (2) and a resin obtained by polymerization thereof. It is possible by the use of this sulfonate resin of the present invention to provide a resist composition with high resolution, board depth of focus tolerance (DOF), small line edge roughness (LER) and high sensitivity. In the formula, Z represents a substituted or unsubstituted C-Cstraight or branched alkylene group, or a divalent moiety in which substituted or unsubstituted C-Cstraight or branched alkylene groups are bonded in series to a divalent group obtained by elimination of two hydrogen atoms from an alicyclic or aromatic hydrocarbon; R represents a hydrogen atom, a halogen atom, or a C-Calkyl or fluorine-containing alkyl group; and Qrepresents a sulfonium cation or an iodonium cation.