The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2014
Filed:
Aug. 26, 2009
Jin-bao Wu, Hsinchu, TW;
Chao-ying Chen, Changhua County, TW;
Chin-te Shih, Hsinchu, TW;
Ming-sheng Leu, Hsinchu County, TW;
Jin-Bao Wu, Hsinchu, TW;
Chao-Ying Chen, Changhua County, TW;
Chin-Te Shih, Hsinchu, TW;
Ming-Sheng Leu, Hsinchu County, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
A vacuum coating apparatus is disclosed. The apparatus includes a cathode target, a plurality of anodes, a transiting device, a pulsed arc discharge device, and a pulsed laser device. The plurality of anodes is placed on the transiting device and successively passes though a working position by the transiting device. The pulsed arc discharge device is electrically connected to the cathode target and the anode at the operable position to form plasma in a vacuum chamber for film coating. The pulsed laser device is located outside of the vacuum chamber and provides a pulsed laser beam onto the surface of the cathode surface to serve as a plasma trigger. A coating method for the vacuum coating apparatus is also disclosed.