The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2014
Filed:
Nov. 02, 2010
Junya Minamida, Kumamoto, JP;
Issei Ueda, Kumamoto, JP;
Junya Minamida, Kumamoto, JP;
Issei Ueda, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Manufacturing cost or energy consumption of a substrate processing apparatus can be reduced. The substrate processing apparatus includes a substrate loading/unloading unit (a substrate transit chamber) that transfers a substrateaccommodated in a carrier; a substrate transfer chamber() communicating with the substrate loading/unloading unit via a substrate loading/unloading port(); a plurality of substrate processing chambersto(to) arranged along the substrate transfer chamber(); a substrate transfer device() provided in the substrate transfer chamber() and configured to transfer the substratebetween the substrate loading/unloading unit and the substrate processing chambersto(to); and a clean air flowing unit() that allows clean air to flow along the substrate transfer chamber().