The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2014
Filed:
Jun. 25, 2009
Siddharth Nagarkatti, Acton, MA (US);
Feng Tian, Woburn, MA (US);
David Lam, Burlington, MA (US);
Abdul Rashid, Salem, NH (US);
Souheil Benzerrouk, Lowell, MA (US);
Ilya Bystryak, Salem, MA (US);
David Menzer, Boxford, MA (US);
Jack J. Schuss, Newton, MA (US);
Jesse E. Ambrosina, Topsfield, MA (US);
Siddharth Nagarkatti, Acton, MA (US);
Feng Tian, Woburn, MA (US);
David Lam, Burlington, MA (US);
Abdul Rashid, Salem, NH (US);
Souheil Benzerrouk, Lowell, MA (US);
Ilya Bystryak, Salem, MA (US);
David Menzer, Boxford, MA (US);
Jack J. Schuss, Newton, MA (US);
Jesse E. Ambrosina, Topsfield, MA (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.