The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2014
Filed:
Apr. 11, 2011
David J. Altknecht, San Jose, CA (US);
Robert E. Erickson, San Jose, CA (US);
Christopher O. Lada, Los Gatos, CA (US);
Stuart Stephen Papworth Parkin, San Jose, CA (US);
Mahesh Samant, San Jose, CA (US);
David J. Altknecht, San Jose, CA (US);
Robert E. Erickson, San Jose, CA (US);
Christopher O. Lada, Los Gatos, CA (US);
Stuart Stephen Papworth Parkin, San Jose, CA (US);
Mahesh Samant, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A device for use in the semiconductor industry includes a robotic arm whose end effector includes at least two prongs designed to hold a substrate carrier. A pushing member located between the prongs can move independently of the prongs and is configured to exert force against the substrate carrier while the prongs are retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the prongs are retracted. Each of the prongs may include a claw or gripping member for grasping the substrate carrier.