The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2014
Filed:
Jan. 18, 2011
Joseph M. Lukaitis, Pleasant Valley, NY (US);
Jed H. Rankin, Richmond, VT (US);
Robert R. Robison, Colchester, VT (US);
Dustin K. Slisher, Wappingers Falls, NY (US);
Timothy D. Sullivan, Underhill, VT (US);
Joseph M. Lukaitis, Pleasant Valley, NY (US);
Jed H. Rankin, Richmond, VT (US);
Robert R. Robison, Colchester, VT (US);
Dustin K. Slisher, Wappingers Falls, NY (US);
Timothy D. Sullivan, Underhill, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of forming a semiconductor structure includes forming a resistor on an insulator layer over a substrate and forming a trench in the resistor and into the substrate. The method also includes forming a liner on sidewalls of the trench and forming a core comprising a high thermal conductivity material in the trench and on the liner.