The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2014
Filed:
Mar. 11, 2011
Kazuyuki Nakanishi, Seto, JP;
Takashi Iseki, Aichi-ken, JP;
Yasuhiro Ozawa, Aichi-ken, JP;
Yuka Yamada, Toyota, JP;
Seiji Mizuno, Nagoya, JP;
Katsumi Sato, Nisshin, JP;
Masafumi Koizumi, Nagoya, JP;
Yoshiyuki Funaki, Kanagawa, JP;
Kyouji Kondo, Kanagawa, JP;
Takayuki Kikuchi, Kanagawa, JP;
Kazuyuki Nakanishi, Seto, JP;
Takashi Iseki, Aichi-ken, JP;
Yasuhiro Ozawa, Aichi-ken, JP;
Yuka Yamada, Toyota, JP;
Seiji Mizuno, Nagoya, JP;
Katsumi Sato, Nisshin, JP;
Masafumi Koizumi, Nagoya, JP;
Yoshiyuki Funaki, Kanagawa, JP;
Kyouji Kondo, Kanagawa, JP;
Takayuki Kikuchi, Kanagawa, JP;
Kabushiki Kaisha Toyota Chuo Kenkyusho, Aichi-gun, JP;
Abstract
This invention adopts plasma-enhanced chemical vapor deposition using the apparatus including a chamber, a pair of rotary electrode reels including a feed-out reel and a take-up reel, a plasma source, a material gas supplier, and an exhaust unit, and includes applying a negative voltage applied to the rotary electrode reels from the plasma source while a conductive substrate is fed-out from the feed-out reel and is wound on the take-up reel so that the entire surface of the substrate portion between reels contacts the material gas, whereby plasma sheath is formed along the surface of the substrate portion between reels, and the material gas is activated in the plasma sheath and thus contacts the surface of the substrate, thus forming the film on the surface of the substrate.