The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2014
Filed:
Jul. 14, 2011
Applicants:
Maarten Stokhof, Almere, NL;
Hessel Sprey, Almere, NL;
Tatsuya Yoshimi, Almere, NL;
Bert Jongbloed, Almere, NL;
Noureddine Adjeroud, Almere, NL;
Inventors:
Maarten Stokhof, Almere, NL;
Hessel Sprey, Almere, NL;
Tatsuya Yoshimi, Almere, NL;
Bert Jongbloed, Almere, NL;
Noureddine Adjeroud, Almere, NL;
Assignee:
ASM International N.V., Almere, NL;
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
Method of depositing a film having a substantially uniform thickness by means of chemical vapor deposition, comprising: