The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 11, 2014

Filed:

Feb. 20, 2007
Applicants:

Gregory A. Dahlen, Santa Barbara, CA (US);

Hao-chih Liu, New York, NY (US);

Inventors:

Gregory A. Dahlen, Santa Barbara, CA (US);

Hao-chih Liu, New York, NY (US);

Assignee:

Bruker Nano, Inc., Santa Barbara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 70/10 (2010.01);
U.S. Cl.
CPC ...
Abstract

A method and apparatus are provided of characterizing a re-entrant SPM probe tip () through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) () and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.


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