The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2014
Filed:
Sep. 20, 2012
Applicant:
Carl Zeiss Microscopy Ltd., Cambridge, GB;
Inventors:
Stewart Bean, Wyton, GB;
Michael Robert Astley, Waterbeach, GB;
Assignee:
Carl Zeiss Microscopy Ltd., Cambridge, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam source is configured to generate a charged particle beam that travels along a particle beam path, and the objective lens is configured to focus the particle beam onto an object plane of the particle optical system. The system is configured such that a light beam path of the system extends from the object plane to the photosensitive detector.