The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2014
Filed:
Dec. 16, 2011
Petri Klemetti, Klaukkala, FI;
Kaisa Nera, Helsinki, FI;
Antti Lipsanen, Espoo, FI;
Anssi Blomqvist, Helsinki, FI;
Altti Torkkeli, Tuusula, FI;
Petri Klemetti, Klaukkala, FI;
Kaisa Nera, Helsinki, FI;
Antti Lipsanen, Espoo, FI;
Anssi Blomqvist, Helsinki, FI;
Altti Torkkeli, Tuusula, FI;
Murata Electronics Oy, Vantaa, FI;
Abstract
The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (), (), (), (), (), () in such a way, that the coupling from one mode of motion to another, conveyed by the spring (), (), (), (), (), (), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.