The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2014
Filed:
Feb. 18, 2011
Sergei Vladimirovich Ivanov, Schnecksville, PA (US);
Wade Hampton Bailey, Iii, Emmaus, PA (US);
Xinjian Lei, Vista, CA (US);
Daniel P. Spence, Carlsbad, CA (US);
Sergei Vladimirovich Ivanov, Schnecksville, PA (US);
Wade Hampton Bailey, III, Emmaus, PA (US);
Xinjian Lei, Vista, CA (US);
Daniel P. Spence, Carlsbad, CA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
Volatile metal amidate metal complexes are exemplified by bis(N-(tert-butyl)ethylamidate)bis(ethylmethylamido) titanium; (N-(tert-butyl)(tert-butyl)amidate)tris(ethylmethylamido) titanium; bis(N-(tert-butyl)(tert-butyl)amidate)bis(dimethylamido) titanium and (N-(tert-butyl)(tert-butyl)amidate)tris(dimethylamido) titanium. The term 'volatile' refers to any precursor of this invention having vapor pressure above 0.5 torr at temperature less than 200° C. Metal-containing film depositions using these metal amidate ligands are also described.