The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2014
Filed:
Mar. 29, 2012
Tetsuo Yoshimura, Kawasaki, JP;
Kenichi Watanabe, Kawasaki, JP;
Satoshi Otsuka, Kawasaki, JP;
Fujitsu Semiconductor Limited, Yokohama, JP;
Abstract
A method of manufacturing a semiconductor device includes: forming a first metal film on an insulating film over a substrate; forming a capacitor lower electrode by patterning the first metal film; and forming a dielectric film on upper and side surfaces of the capacitor lower electrode and on the insulating film. The method further includes: forming a conductive protection film on the dielectric film; patterning the conductive protection film into a shape of covering the capacitor lower electrode; forming a capacitor dielectric film in a shape of covering the upper and side surfaces of the capacitor lower electrode, by patterning the dielectric film so that the patterned conductive protection film covers an upper surface of the capacitor dielectric film; forming a second metal film on the patterned conductive protection film; and forming a capacitor upper electrode that covers at least an upper surface of the patterned conductive protection film.